Semiconductor device

ABSTRACT

A semiconductor device includes a substrate having a first region and a second region, first and second nanowires disposed sequentially on the substrate in the first region, and extending respectively in a first direction, third and fourth nanowires disposed sequentially on the substrate in the second region, and extending respectively in the first direction, a first inner spacer between the first nanowire and the second nanowire, and including hydrogen of a first hydrogen mole fraction, and a second inner spacer between the third nanowire and the fourth nanowire, and including hydrogen of a second hydrogen mole fraction that is greater than the first hydrogen mole fraction.

CROSS-REFERENCE TO RELATED APPLICATION

Korean Patent Application No. 10-2019-0091531, filed on Jul. 29, 2019,in the Korean Intellectual Property Office, and entitled: “SemiconductorDevice,” is incorporated by reference herein in its entirety.

BACKGROUND 1. Field

Embodiments relate to a semiconductor device.

2. Description of the Related Art

A multigate transistor has been suggested as one of the scalingtechnologies to increase density of semiconductor devices, in which asilicon body in a fin or nanowire shape is formed on a substrate withgates then are formed on a surface of the silicon body.

Such a multigate transistor allows easy scaling, as it uses athree-dimensional channel. Further, current control capability can beenhanced without requiring increased gate length of the multigatetransistor. Not only that, it is possible to effectively inhibit theshort channel effect (SCE) in which the electric potential of a channelregion is affected by a drain voltage.

SUMMARY

Embodiments are directed to a semiconductor device, including asubstrate having a first region and a second region, first and secondnanowires disposed sequentially on the substrate in the first region,and extending respectively in a first direction, third and fourthnanowires disposed sequentially on the substrate in the second region,and extending respectively in the first direction, a first inner spacerbetween the first nanowire and the second nanowire, and includinghydrogen of a first hydrogen mole fraction, and a second inner spacerbetween the third nanowire and the fourth nanowire, and includinghydrogen of a second hydrogen mole fraction that is greater than thefirst hydrogen mole fraction.

Embodiments are also directed to a semiconductor device, including asubstrate having a first region and a second region, first and secondnanowires disposed sequentially on the substrate in the first region andextending respectively in a first direction, third and fourth nanowiresdisposed sequentially on the substrate in the second region andextending respectively in the first direction, a first gate electrodesurrounding the first and second nanowires and extending in a seconddirection different from the first direction, a second gate electrodesurrounding the third and fourth nanowires and extending in the seconddirection, a first inner spacer on at least one side of the first gateelectrode between the first nanowire and the second nanowire, andincluding oxygen of a first oxygen mole fraction, and a second innerspacer on at least one side of the second gate electrode between thethird nanowire and the fourth nanowire, and including oxygen of a secondoxygen mole fraction that is greater than the first oxygen molefraction.

Embodiments are also directed to a semiconductor device, including asubstrate having a first region and a second region, first to thirdnanowires disposed sequentially on the substrate in the first region andextending respectively in a first direction, fourth to sixth nanowiresdisposed sequentially on the substrate in the second region andextending respectively in the first direction, a first gate electrodesurrounding the first to third nanowires and extending in a seconddirection different from the first direction, a second gate electrodesurrounding the fourth to sixth nanowires and extending in the seconddirection, a first source/drain region on at least one side of the firstto third nanowires, a second source/drain region on at least one side ofthe fourth to sixth nanowires, a first inner spacer on at least one sideof the first gate electrode between the first nanowire and the secondnanowire, and including oxygen of a first oxygen mole fraction andhydrogen of a first hydrogen mole fraction, a second inner spacer on atleast one side of the second gate electrode between the fourth nanowireand the fifth nanowire, and including oxygen of a second oxygen molefraction that is greater than the first oxygen mole fraction, andhydrogen of a second hydrogen mole fraction that is greater than thefirst hydrogen mole fraction, a first source/drain contact connectedwith the first source/drain region, and a second source/drain contactconnected with the second source/drain region.

BRIEF DESCRIPTION OF THE DRAWINGS

Features will become apparent to those of skill in the art by describingin detail example embodiments with reference to the attached drawings,in which:

FIG. 1 illustrates a schematic top view of a semiconductor deviceaccording to an example embodiment;

FIG. 2 illustrates a cross-sectional view taken along line A-A′ of FIG.1;

FIG. 3 illustrates a cross-sectional view taken along line B-B′ of FIG.1;

FIG. 4 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2;

FIG. 5 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2 according to another example embodiment;

FIG. 6 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2 according to another example embodiment;

FIG. 7 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2 according to another example embodiment;

FIG. 8 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2 according to another example embodiment;

FIG. 9 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2 according to another example embodiment;

FIG. 10 illustrates an enlarged view of a region R1 and a region R2 ofFIG. 2 according to another example embodiment;

FIG. 11 illustrates a cross-sectional view of a semiconductor deviceaccording to another example embodiment;

FIG. 12 illustrates a cross-sectional view of a semiconductor deviceaccording to another example embodiment;

FIG. 13 illustrates a cross-sectional view of a semiconductor deviceaccording to another example embodiment;

FIG. 14 illustrates a cross-sectional view of a semiconductor deviceaccording to another example embodiment; and

FIG. 15 illustrates a cross-sectional view of a semiconductor deviceaccording to another example embodiment.

DETAILED DESCRIPTION

Hereinbelow, a semiconductor device according to an example embodimentwill be described with reference to FIGS. 1 to 4. FIG. 1 is a schematictop view. FIG. 2 is a cross-sectional view taken along line A-A′ ofFIG. 1. FIG. 3 is a cross-sectional view taken along line B-B′ ofFIG. 1. FIG. 4 is an enlarged view of a region R1 and a region R2 ofFIG. 2.

Referring to FIGS. 1 to 4, the semiconductor device according to anexample embodiment includes a substrate 100, a device isolation film105, a first lower pattern 101, a second lower pattern 102, first tosixth nanowires 111, 112, 113, 114, 115, 116, a first gate structure120, a second gate structure 130, first to fourth pin-cut gatestructures 120_1, 120_2, 130_1, 130_2, a first source/drain region 151,a second source/drain region 152, a first interlayer insulating film162, a second interlayer insulating film 170, a first source/draincontact 181, a second source/drain contact 182, a first silicide film191, and a second silicide film 192. (For convenience of explanation,FIG. 1 does not illustrate the first interlayer insulating film 162, thesecond interlayer insulating film 170, the first source/drain contact181, or the second source/drain contact 182.)

The substrate 100 may be, for example, bulk silicon or asilicon-on-insulator (SOI). In an implementation, the substrate 100 maybe a silicon substrate, or may include other materials such as silicongermanium, silicon germanium on insulator (SGOI), indium antimonide,lead telluride, indium arsenide, indium phosphide, gallium arsenide,gallium antimonide, etc.

On the substrate 100, a first region I and a second region II may bedefined. The first region I may include the first lower pattern 101, andthe second region II may include the second lower pattern 102. The firstregion I may be, for example, an NMOS region, and the second region IImay be, for example, a PMOS region.

The threshold voltage in the first region I and the second region II maybe different from each other. For example, a threshold voltage of thefirst region I may be more than that of the second region II.

The first lower pattern 101 and the second lower pattern 102 mayrespectively protrude from the substrate 100. The first lower pattern101 and the second lower pattern 102 may extend longitudinally in afirst direction X, respectively. The first lower pattern 101 and thesecond lower pattern 102 may be aligned in the first direction X as alength direction. The first lower pattern 101 and the second lowerpattern 102 may be spaced apart from each other in the first directionX.

The first lower pattern 101 and the second lower pattern 102 may berespectively formed by etching a portion of the substrate 100, and mayinclude an epitaxial layer grown from the substrate 100.

The first lower pattern 101 and the second lower pattern 102 may have apin-type pattern shape, for example. The first lower pattern 101 and thesecond lower pattern 102 may be isolated by the device isolation film105.

The device isolation film 105 may be disposed on the substrate 100. Thedevice isolation film 105 may be disposed on sidewalls of the firstlower pattern 101 and the second lower pattern 102. The device isolationfilm 105 may include, for example, at least one of a silicon oxide film,a silicon nitride film, or a silicon oxynitride film.

FIG. 2 illustrates an example in which three nanowires 111, 112, 113 arestacked sequentially on the substrate 100 in the first region I, andother three nanowires 114, 115, 116 are stacked sequentially on thesubstrate 100 in the second region II. According to another exampleembodiment, a number of nanowires disposed on the substrate 100 in thefirst region I may be different from the above, and a number ofnanowires disposed on the substrate 100 in the second region II may bealso different from the above.

The first to third nanowires 111, 112, 113 may be spaced apart from oneanother sequentially in a third direction Z on the substrate 100 in thefirst region I, where Z is a thickness direction of the substrate 100.For example, the first nanowire 111 may be disposed on the substrate 100in the first region I to be spaced apart therefrom in the thirddirection Z. The second nanowire 112 may be disposed on the firstnanowire 111 to be spaced apart therefrom in the third direction Z. Thethird nanowire 113 may be disposed on the second nanowire 112 to bespaced apart therefrom in the third direction Z.

Each of the first to third nanowires 111, 112, 113 may extend in thefirst direction X. Each of the first to third nanowires 111, 112, 113may be used as a channel region of the NMOS transistor. Each of thefirst to third nanowires 111, 112, 113 may include, for example, amaterial having high mobility for electrons.

The fourth to sixth nanowires 114, 115, 116 may be disposed on thesubstrate 100 in the second region II to be spaced apart from oneanother sequentially in the third direction Z. For example, the fourthnanowire 114 may be disposed on the substrate 100 in the second regionII to be spaced apart therefrom in the third direction Z. The fifthnanowire 115 may be disposed on the fourth nanowire 114 to be spacedapart therefrom in the third direction Z. The sixth nanowire 116 may bedisposed on the fifth nanowire 115 to be spaced apart therefrom in thethird direction Z.

The fourth to sixth nanowires 114, 115, 116 may extend in the firstdirection X, respectively. Each of the fourth to sixth nanowires 114,115, 116 may be used as a channel region of the PMOS transistor. Each ofthe fourth to sixth nanowires 114, 115, 116 may include, for example, amaterial having high mobility for holes.

The first nanowire 111 may be disposed on a same level as that of thefourth nanowire 114. The second nanowire 112 may be disposed on a samelevel as that of the fifth nanowire 115. The third nanowire 113 may bedisposed on a same level as that of the sixth nanowire 116.

The first gate structure 120 may be disposed on the substrate 100 in thefirst region I. The first gate structure 120 may extend in a seconddirection Y and intersect with the first lower pattern 101.

The first pin-cut gate structure 120_1 may be spaced apart in the firstdirection X from the first gate structure 120 on the substrate 100 inthe first region I. The first pin-cut gate structure 120_1 may extend inthe second direction Y and intersect with the first lower pattern 101.

The second pin-cut gate structure 120_2 may be spaced apart in the firstdirection X from the first gate structure 120 on the substrate 100 inthe first region I. The second pin-cut gate structure 120_2 may extendin the second direction Y and intersect with the first lower pattern101. The first gate structure 120 may be disposed between the firstpin-cut gate structure 120_1 and the second pin-cut gate structure120_2.

The first gate structure 120 may entirely overlap the first lowerpattern 101. Each of the first pin-cut gate structure 120_1 and thesecond pin-cut gate structure 120_2 may overlap a portion of the firstlower pattern 101. For example, a width in the first direction X wherethe first gate structure 120 intersects with the first lower pattern 101may be same as a width in the first direction X of the first gatestructure 120. A width in the first direction X where the first pin-cutgate structure 120_1 intersects with the first lower pattern 101 may beless than a width in the first direction X of the first pin-cut gatestructure 120_1. A width in the first direction X where the secondpin-cut gate structure 120_2 intersects with the first lower pattern 101may be less than a width in the first direction X of the second pin-cutgate structure 120_2.

The first gate structure 120 may surround the first to third nanowires111, 112, 113. The first pin-cut gate structure 120_1 may surround,e.g., entirely surround, an end of each of the first to third nanowires111, 112, 113. The second pin-cut gate structure 120_2 may entirelysurround another end of each of the first to third nanowires 111, 112,113, which other end opposes the end of each of the first to thirdnanowires 111, 112, 113 surrounded by the first pin-cut gate structure120_1.

The first source/drain region 151 may be disposed between the first tothird nanowires 111, 112, 113 surrounded by the first gate structure 120and the first to third nanowires 111, 112, 113 surrounded by the firstpin-cut gate structure 120_1. Further, the first source/drain region 151may be disposed between the first to third nanowires 111, 112, 113surrounded by the first gate structure 120 and the first to thirdnanowires 111, 112, 113 surrounded by the second pin-cut gate structure120_2.

The second gate structure 130 may be disposed on the substrate 100 inthe second region II. The second gate structure 130 may extend in thesecond direction Y and intersect with the second lower pattern 102.

The third pin-cut gate structure 1301 may be spaced apart in the firstdirection X from the second gate structure 130 on the substrate 100 inthe second region II. The third pin-cut gate structure 1301 may extendin the second direction Y and intersect with the second lower pattern102.

The fourth pin-cut gate structure 130_2 may be spaced apart in the firstdirection X from the second gate structure 130 on the substrate 100 inthe second region II. The fourth pin-cut gate structure 130_2 may extendin the second direction Y and intersect with the second lower pattern102. The second gate structure 130 may be disposed between the thirdpin-cut gate structure 130_1 and the fourth pin-cut gate structure 1302.

The second gate structure 130 may entirely overlap the second lowerpattern 102. Each of the third pin-cut gate structure 130_1 and thefourth pin-cut gate structure 130_2 may overlap a portion of the secondlower pattern 102. For example, a width in the first direction X wherethe second gate structure 130 intersects with the second lower pattern102 may be same as a width in the first direction X of the second gatestructure 130. A width in the first direction X where the third pin-cutgate structure 130_1 intersects with the second lower pattern 102 may beless than a width in the first direction X of the third pin-cut gatestructure 130_1. A width in the first direction X where the fourthpin-cut gate structure 130_2 intersects with the second lower pattern102 may be less than a width in the first direction X of the fourthpin-cut gate structure 130_2.

The second gate structure 130 may surround the fourth to sixth nanowires114, 115, 116. The third pin-cut gate structure 130_1 may surround,e.g., entirely surround, an end of each of the fourth to sixth nanowires114, 115, 116. The fourth pin-cut gate structure 130_2 may surround,e.g., entirely surround, another end of each of the fourth to sixthnanowires 114, 115, 116, which other end opposes the end of each of thefourth to sixth nanowires 114, 115, 116 surrounded by the third pin-cutgate structure 130_1.

The second source/drain region 152 may be disposed between the fourth tosixth nanowires 114, 115, 116 surrounded by the second gate structure130 and the fourth to sixth nanowires 114, 115, 116 surrounded by thethird pin-cut gate structure 130_1. Further, the second source/drainregion 152 may be disposed between the fourth to sixth nanowires 114,115, 116 surrounded by the second gate structure 130 and the fourth tosixth nanowires 114, 115, 116 surrounded by the fourth pin-cut gatestructure 1302.

Each of the first gate structure 120, the first pin-cut gate structure120_1 and the second pin-cut gate structure 1202 may include a firstgate electrode 121, a first gate insulating film 122, a first cappingpattern 123, a first outer spacer 124, and a first inner spacer 141.

Each of the second gate structure 130, the third pin-cut gate structure1301, and the fourth pin-cut gate structure 1302 may include a secondgate electrode 131, a second gate insulating film 132, a second cappingpattern 133, a second outer spacer 134, and a second inner spacer 142.

Hereinbelow, the first gate structure 120, the first pin-cut gatestructure 120_1, and the second pin-cut gate structure 120_2 will bedescribed. Description relating to the second gate structure 130, thethird pin-cut gate structure 130_1, and the fourth pin-cut gatestructure 1302 may be easily understood from the description relating tothe first gate structure 120, the first pin-cut gate structure 120_1,and the second pin-cut gate structure 120_2.

The first gate electrode 121 may extend in the second direction Y on thesubstrate 100 in the first region I. The first gate electrode 121 maysurround each of the first to third nanowires 111, 112, 113.

The first gate electrode 121 may include at least one of, for example,titanium nitride (TiN), tantalum carbide (TaC), tantalum nitride (TaN),titanium silicon nitride (TiSiN), tantalum silicon nitride (TaSiN),tantalum titanium nitride (TaTiN), titanium aluminum nitride (TiAlN),tantalum aluminum nitride (TaAlN), tungsten nitride (WN), ruthenium(Ru), titanium aluminum (TiAl), titanium aluminum carbonitride (TiACN),titanium aluminum carbide (TiAlC), titanium carbide (TiC), tantalumcarbonitride (TaCN), tungsten (W), aluminum (Al), copper (Cu), cobalt(Co), titanium (Ti), tantalum (Ta), nickel (Ni), platinum (Pt), nickelplatinum (Ni—Pt), niobium (Nb), niobium nitride (NbN), niobium carbide(NbC), molybdenum (Mo), molybdenum nitride (MoN), molybdenum carbide(MoC), tungsten carbide (WC), rhodium (Rh), palladium (Pd), iridium(Ir), osmium (Os), silver (Ag), gold (Au), zinc (Zn), vanadium (V), anda combination thereof. The first gate electrodes 121 may respectivelyinclude conductive metal oxide, conductive metal oxynitride, or thelike, or an oxidized form of the aforementioned material.

The first gate insulating film 122 may be disposed along both sidewallsand a bottom surface of the first gate electrode 121. The first gateinsulating film 122 may be disposed between the substrate 100 in thefirst region I and the first gate electrode 121, between the deviceisolation film 105 and the first gate electrode 121, between the firstnanowire 111 and the first gate electrode 121, between the secondnanowire 112 and the first gate electrode 121, and between the thirdnanowire 113 and the first gate electrode 121. Further, the first gateinsulating film 122 may be disposed between the first inner spacer 141and the first gate electrode 121, and between the first outer spacer 124and the first gate electrode 121.

The first gate insulating film 122 may contain at least one of siliconoxide, silicon oxynitride, silicon nitride, and a high-k dielectricmaterial (i.e., having a dielectric constant higher than silicon oxide).For example, the high-k dielectric material may include one or more ofhafnium oxide, hafnium silicon oxide, hafnium aluminum oxide, lanthanumoxide, lanthanum aluminum oxide, zirconium oxide, zirconium siliconoxide, tantalum oxide, titanium oxide, barium strontium titanium oxide,barium titanium oxide, strontium titanium oxide, yttrium oxide, aluminumoxide, lead scandium tantalum oxide, or lead zinc niobate.

The first capping pattern 123 may be disposed on the first gateelectrode 121. Although it is illustrated that the first gate insulatingfilm 122 is not disposed between the first outer spacer 124 and thefirst capping pattern 123, this is provided only for convenience ofexplanation.

Although FIG. 2 illustrates that the first capping pattern 123 is formedbetween an inner side wall of the first outer spacer 124, according toanother example embodiment, an upper surface of the first outer spacer124 may be recessed to be lower than an upper surface of the firstinterlayer insulating film 162 as in the first gate electrode 121. Inthis case, the first capping pattern 123 may be disposed on an uppersurface of the first outer spacer 124 and an upper surface of the firstgate electrode 121.

An upper surface of the first capping pattern 123 may be formed on asame plane as an upper surface of the first interlayer insulating film162. The first capping pattern 123 may include, for example, a materialhaving etch selectivity to the first interlayer insulating film 162. Forexample, the first capping pattern 123 may include at least one ofsilicon nitride (SiN), silicon oxynitride (SiON), silicon oxide (SiO₂),silicon carbonitride (SiCN), silicon oxycarbonitride (SiOCN), and acombination thereof.

The first outer spacer 124 may extend in the second direction Y along asidewall of the first gate electrode 121 on the third nanowire 113. Thefirst outer spacer 124 may intersect with the first to third nanowires111, 112, 113.

A portion of the first outer spacer 124 included in the first pin-cutgate structure 120_1 may extend in the second direction Y along asidewall of the first gate electrode 121 on the device isolation film105. Further, a portion of the first outer spacer 124 included in thesecond pin-cut gate structure 120_2 may extend in the second direction Yalong a sidewall of the first gate electrode 121 on the device isolationfilm 105.

Although FIG. 2 illustrates that the first outer spacer 124 is formed asa single film, according to another example embodiment, the first outerspacer 124 may be formed as a multi-layered film.

The first outer spacer 124 may include, for example, at least one ofsilicon nitride (SiN), silicon oxynitride (SiON), silicon oxide (SiO₂),silicon oxycarbonitride (SiOCN), silicon boron nitride (SiBN), siliconoxyboron nitride (SiOBN), silicon oxycarbide (SiOC), and a combinationthereof.

The first source/drain region 151 may be disposed between the first gatestructure 120 and the first pin-cut gate structure 120_1, and betweenthe first gate structure 120 and the second pin-cut gate structure120_2, respectively. The first source/drain region 151 may be disposedon the first lower pattern 101. The first source/drain region 151 may bein direct contact with the first to third nanowires 111, 112, 113,respectively.

An upper surface of the first source/drain region 151 may be formed onsubstantially a same plane as an upper surface of the third nanowire113, which is an uppermost nanowire on the first lower pattern 101.

The second source/drain region 152 may be disposed between the secondgate structure 130 and the third pin-cut gate structure 130_1, andbetween the second gate structure 130 and the fourth pin-cut gatestructure 130_2, respectively. The second source/drain region 152 may bedisposed on the second lower pattern 102. The second source/drain region152 may be in direct contact with the fourth to sixth nanowires 114,115, 116, respectively.

An upper surface of the second source/drain region 152 may be formed ona same plane substantially as an upper surface of the sixth nanowire116, which is an uppermost nanowire on the second lower pattern 102.

The first inner spacer 141 may be disposed on at least one side of thefirst gate electrode 121 between the first lower pattern 101 and thefirst nanowire 111. The first inner spacer 141 may be disposed on atleast one side of the first gate electrode 121 between the firstnanowire 111 and the second nanowire 112. The first inner spacer 141 maybe disposed on at least one side of the first gate electrode 121 betweenthe second nanowire 112 and the third nanowire 113.

The first inner spacer 141 may be disposed between the first gateelectrode 121 and the first source/drain region 151 which are includedin the first gate structure 120. The first inner spacer 141 may bedisposed between the first gate electrode 121 and the first source/drainregion 151 which are included in the first pin-cut gate structure 120_1.The first inner spacer 141 may be disposed between the first gateelectrode 121 and the first source/drain region 151 which are includedin the second pin-cut gate structure 120_2.

The first inner spacer 141 may have a quadrilateral shape where bothsidewalls are formed to be curved surface. Thus, each of a sidewall ofthe first inner spacer 141 in contact with the first source/drain region151 and a sidewall of the first inner spacer 141 in contact with thefirst gate insulating film 122 may be formed to be curved surface.

The second inner spacer 142 may be disposed on at least one side of thesecond gate electrode 131 between the second lower pattern 102 and thefourth nanowire 114. The second inner spacer 142 may be disposed on atleast one side of the second gate electrode 131 between the fourthnanowire 114 and the fifth nanowire 115. The second inner spacer 142 maybe disposed on at least one side of the second gate electrode 131between the fifth nanowire 115 and the sixth nanowire 116.

The second inner spacer 142 may be disposed between the second gateelectrode 131 and the second source/drain region 152 which are includedin the second gate structure 130. The second inner spacer 142 may bedisposed between the second gate electrode 131 and the secondsource/drain region 152 which are included in the third pin-cut gatestructure 130_1. The second inner spacer 142 may be disposed between thesecond gate electrode 131 and the second source/drain region 152 whichare included in the fourth pin-cut gate structure 130_2.

The second inner spacer 142 may have a quadrilateral shape where bothsidewalls are formed to be curved surface. Thus, each of a sidewall ofthe second inner spacer 142 in contact with the second source/drainregion 152 and a sidewall of the second inner spacer 142 in contact withthe second gate insulating film 132 may be formed to be curved surface.

The first inner spacer 141 and the second inner spacer 142 may havedifferent properties from each other. For example, in the first innerspacer 141 and the second inner spacer 142, at least one of a hydrogenmole fraction and an oxygen mole fraction may be different. A “molefraction” expressed herein indicates a mole ratio of a certain componentwith respect to entire components in a material system including two ormore components. For example, 10% content of a first material mayindicate that a mole ratio of the first material with respect to a molenumber of entire components is 1/10.

According to an example embodiment, an oxygen mole fraction included ineach of the first inner spacer 141 and the second inner spacer 142 maybe same as each other, and a hydrogen mole fraction included in each ofthe first inner spacer 141 and the second inner spacer 142 may bedifferent from each other. For example, the first inner spacer 141 mayinclude hydrogen having a first hydrogen mole fraction, and the secondinner spacer 142 may include hydrogen having a second hydrogen molefraction that is greater than a first hydrogen mole fraction. In thiscase, for example, a first hydrogen mole fraction may be 2% to 5%, and asecond hydrogen mole fraction may be 5% to 10%.

According to another example embodiment, a first oxygen mole fraction ofoxygen included in the first inner spacer 141 and a second oxygen molefraction of oxygen included in the second inner spacer 142 may bedifferent from each other.

According to an example embodiment, a hydrogen mole fraction included ineach of the first inner spacer 141 and the second inner spacer 142 maybe same as each other, and an oxygen mole fraction included in each ofthe first inner spacer 141 and the second inner spacer 142 may bedifferent from each other. For example, the first inner spacer 141 mayinclude a first oxygen mole fraction of oxygen, and the second innerspacer 142 may include a second oxygen mole fraction that is greaterthan a first oxygen mole fraction. In this case, for example, a firstoxygen mole fraction may be 2% to 5%, and a second oxygen mole fractionmay be 5% to 10%.

According to another example embodiment, a first hydrogen mole fractionof hydrogen included in the first inner spacer 141 and a second hydrogenmole fraction of hydrogen included in the second inner spacer 142 may bedifferent from each other. Thus, the first inner spacer 141 may includea first oxygen mole fraction of oxygen and a first hydrogen molefraction of hydrogen, and the second inner spacer 142 may include asecond oxygen mole fraction of oxygen that is greater than a firstoxygen mole fraction, and a second hydrogen mole fraction of hydrogenthat is greater than a first hydrogen mole fraction.

The thickness in the first direction X in each of the first inner spacer141 and the second inner spacer 142, which are disposed on a same level,may be same as each other. For example, a first thickness t1 in thefirst direction X of the first inner spacer 141 disposed between thefirst nanowire 11 and the second nanowire 112 may be same as a secondthickness t2 in the first direction X of the second inner spacer 142disposed between the fourth nanowire 114 and the fifth nanowire 115. Inan example embodiment, a thickness in the first direction X of the firstinner spacer 141 may be 3 nm to 5 nm, and a thickness in the firstdirection X of the second inner spacer 142 may be 2 nm to 4 nm.

A first hydrogen mole fraction, a first oxygen mole fraction, and athickness in the first direction X with respect to the first innerspacer 141 may be adjusted co-operatively so as to adjust a thresholdvoltage of the NMOS transistor formed in the first region I of thesubstrate 100. Similarly, a second hydrogen mole fraction, a secondoxygen mole fraction, and a thickness in the first direction X withrespect to the second inner spacer 142 may be adjusted co-operatively soas to adjust a threshold voltage of the PMOS transistor formed in thesecond region II of the substrate 100.

The first inner spacer 141 and the second inner spacer 142 may includedifferent materials from each other. For example, the first inner spacer141 may include SiN, and the second inner spacer 142 may include SiON.According to another example embodiment, the first inner spacer 141 andthe second inner spacer 142 may include a same material as each other.For example, each of the first inner spacer 141 and the second innerspacer 142 may include SiN. Further, for example, each of the firstinner spacer 141 and the second inner spacer 142 may include SiON.

An etch stop film 161 may be disposed along an external sidewall of thefirst outer spacer 124, an external sidewall of the second outer spacer134, and an upper surface of the device isolation film 105. The etchstop film 161 may include, for example, any one of silicon nitride(SiN), silicon oxynitride (SiON), silicon oxide (SiO₂), siliconoxycarbonitride (SiOCN), and a combination thereof. The etch stop film161 may include a material having etch selectivity to the firstinterlayer insulating film 162, which will be described hereinbelow.

The first interlayer insulating film 162 may be disposed on the etchstop film 161. The first interlayer insulating film 162 may surroundsidewalls of the first outer spacer 124 and the second outer spacer 134.The first interlayer insulating film 162 may include, for example, atleast one of silicon oxide, silicon nitride, and silicon oxynitride.

The second interlayer insulating film 170 may be disposed on the firstinterlayer insulating film 162. The second interlayer insulating film170 may cover the first gate structure 120, the first pin-cut gatestructure 120_1, the second pin-cut gate structure 120_2, the secondgate structure 130, the third pin-cut gate structure 1301, and thefourth pin-cut gate structure 130_2. The second interlayer insulatingfilm 170 may include, for example, at least one of silicon oxide,silicon nitride, and silicon oxynitride.

The first source/drain contact 181 and the second source/drain contact182 may be disposed within the second interlayer insulating film 170 andthe first interlayer insulating film 162.

The first source/drain contact 181 may extend within the firstsource/drain region 151 on the first lower pattern 101. The firstsource/drain contact 181 may extend, for example, to a same level asthat of the second nanowire 112.

The second source/drain contact 182 may extend within the secondsource/drain region 152 on the second lower pattern 102. The secondsource/drain contact 182 may extend, for example, to a same level asthat of the fifth nanowire 115.

The first silicide film 191 may be disposed between the firstsource/drain contact 181 and the first source/drain region 151. Thesecond silicide film 192 may be disposed between the second source/draincontact 182 and the second source/drain region 152.

The semiconductor device according to an example embodiment may enhancereliability of the semiconductor device by adjusting a property of thefirst inner spacer 141 disposed on the NMOS region and a property of thesecond inner spacer 142 disposed on the PMOS region and efficientlyforming threshold voltage shift between a threshold voltage of the NMOStransistor and a threshold voltage of the PMOS transistor.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 5. The differencefrom the semiconductor device illustrated in FIG. 4 will be highlighted.FIG. 5 is an enlarged view of a region R1 and a region R2 of FIG. 2according to another example embodiment.

Referring to FIG. 5, in the semiconductor device according to anotherexample embodiment, a first thickness t1 in the first direction X of thefirst inner spacer 141 disposed on the first lower pattern 101 may begreater than a third thickness t3 in the first direction X of the secondinner spacer 242 disposed on the second lower pattern 102.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 6. The differencefrom the semiconductor device illustrated in FIG. 4 will be highlighted.FIG. 6 is an enlarged view of a region R1 and a region R2 of FIG. 2according to another example embodiment.

Referring to FIG. 6, in the semiconductor device according to anotherexample embodiment, a first inner spacer 341 disposed on the first lowerpattern 101 may be formed to be convex toward the first gate electrode121. Further, the second inner spacer 342 disposed on the second lowerpattern 102 may be formed to be convex toward the second gate electrode131. Herein, convex formation indicates that a sidewall has a curvedsurface shape entirely.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 7. The differencefrom the semiconductor device illustrated in FIG. 4 will be highlighted.FIG. 7 is an enlarged view of a region R1 and a region R2 of FIG. 2according to another example embodiment.

Referring to FIG. 7, in the semiconductor device according to anotherexample embodiment, each of an inner spacer 441 disposed on the firstlower pattern 101 and an inner spacer 442 disposed on the second lowerpattern 102 may be formed to be a multi-layered film.

For example, the inner spacer 441 may include a first inner spacer 441_1in contact with the first gate insulating film 122 and a third innerspacer 441_2 disposed between the first inner spacer 441_1 and the firstsource/drain region 151.

An upper surface of the first inner spacer 441_1 may be in contact withthe second nanowire 112, and a lower surface of the first inner spacer441_1 may be in contact with the first nanowire 111. The third innerspacer 441_2 may be formed to be convex toward the first inner spacer441_1.

For example, the inner spacer 442 may include a second inner spacer442_1 in contact with the second gate insulating film 132 and a fourthinner spacer 442_2 disposed between the second inner spacer 442_1 andthe second source/drain region 152.

An upper surface of the second inner spacer 442_1 may be in contact withthe fifth nanowire 115, and a lower surface of the second inner spacer442_1 may be in contact with the fourth nanowire 114. The fourth innerspacer 442_2 may be formed to be convex toward the second inner spacer442_1.

The first inner spacer 441_1 and the second inner spacer 442_1 may havedifferent properties from each other. The third inner spacer 441_2 andthe fourth inner spacer 442_2 may have a same property.

The first inner spacer 441_1 and the second inner spacer 442_1 mayinclude another material than those of the third inner spacer 441_2 andthe fourth inner spacer 442_2. For example, each of the first innerspacer 441_1 and the second inner spacer 442_1 may include SiON, andeach of the third inner spacer 441_2 and the fourth inner spacer 442_2may include SiN.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 8. The differencefrom the semiconductor device illustrated in FIG. 4 will be highlighted.FIG. 8 is an enlarged view of a region R1 and a region R2 of FIG. 2according to another example embodiment.

Referring to FIG. 8, in the semiconductor device according to anotherexample embodiment, each of an inner spacer 541 disposed on the firstlower pattern 101 and an inner spacer 542 disposed on the second lowerpattern 102 may be formed to be a multi-layered film.

For example, the inner spacer 541 may include a first inner spacer 541_1in contact with the first gate insulating film 122 and a third innerspacer 541_2 disposed between the first inner spacer 541_1 and the firstsource/drain region 151.

An upper surface of the first inner spacer 541_1 may be in contact withthe second nanowire 112, and a lower surface of the first inner spacer541_1 may be in contact with the first nanowire 11 l. An upper surfaceof the third inner spacer 541_2 may be in contact with the secondnanowire 112, and a lower surface of the third inner spacer 541_2 may bein contact with the first nanowire 111.

The inner spacer 542 may include, for example, a second inner spacer542_1 in contact with the second gate insulating film 132 and a fourthinner spacer 542_2 disposed between the second inner spacer 542_1 andthe second source/drain region 152.

An upper surface of the second inner spacer 542_1 may be in contact withthe fifth nanowire 115, and a lower surface of the second inner spacer542_1 may be in contact with the fourth nanowire 114. An upper surfaceof the fourth inner spacer 542_2 may be in contact with the fifthnanowire 115, and a lower surface of the fourth inner spacer 5422 may bein contact with the fourth nanowire 114.

The first inner spacer 541_1 and the second inner spacer 542_1 may havedifferent properties from each other. The third inner spacer 541_2 andthe fourth inner spacer 542_2 may have a same property. For example, thefirst inner spacer 541_1 and the second inner spacer 542_1 may includematerials different from those of the third inner spacer 541_2 and thefourth inner spacer 542_2.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 9. The differencefrom the semiconductor device illustrated in FIG. 4 will be highlighted.FIG. 9 is an enlarged view of a region R1 and a region R2 of FIG. 2according to another example embodiment.

Referring to FIG. 9, in the semiconductor device according to anotherexample embodiment, each of an inner spacer 641 disposed on the firstlower pattern 101 and an inner spacer 642 disposed on the second lowerpattern 102 may be formed to be a multi-layered film.

For example, the inner spacer 641 may include a first inner spacer 641_1in contact with the first gate insulating film 122 and a third innerspacer 641_2 disposed between the first inner spacer 641_1 and the firstsource/drain region 151.

The first inner spacer 641_1 may be disposed conformally along the firstgate insulating film 122, an upper surface of the first nanowire 111,and a lower surface of the second nanowire 112.

For example, the inner spacer 642 may include a second inner spacer 6421in contact with the second gate insulating film 132 and a fourth innerspacer 642_2 disposed between the second inner spacer 642_1 and thesecond source/drain region 152.

The second inner spacer 642_1 may be disposed conformally along thesecond gate insulating film 132, an upper surface of the fourth nanowire114, and a lower surface of the fifth nanowire 115.

The first inner spacer 641_1 and the second inner spacer 642_1 may havedifferent properties from each other. The third inner spacer 641_2 andthe fourth inner spacer 642_2 may have a same property. For example, thefirst inner spacer 641_1 and the second inner spacer 642_1 may havedifferent materials from those of the third inner spacer 641_2 and thefourth inner spacer 642_2.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 10. The differencefrom the semiconductor device illustrated in FIG. 4 will be highlighted.FIG. 10 is an enlarged view of a region R1 and a region R2 of FIG. 2according to another example embodiment.

Referring to FIG. 10, in the semiconductor device according to anotherexample embodiment, each of an inner spacer 741 disposed on the firstlower pattern 101 and an inner spacer 742 disposed on the second lowerpattern 102 may be formed to be a multi-layered film.

For example, the inner spacer 741 may include a first inner spacer 741_1in contact with the first gate insulating film 122 and a third innerspacer 741_2 disposed between the first inner spacer 741_1 and the firstsource/drain region 151. Each of the first inner spacer 741_1 and thethird inner spacer 741_2 may be formed to be convex toward the firstgate electrode 121.

For example, the inner spacer 742 may include a second inner spacer 7421in contact with the second gate insulating film 132 and a fourth innerspacer 742_2 disposed between the second inner spacer 742_1 and thesecond source/drain region 152. Each of the second inner spacer 742_1and the fourth inner spacer 742_2 may be formed to be convex toward thesecond gate electrode 131.

The first inner spacer 741_1 and the second inner spacer 742_1 may havedifferent properties from each other. The third inner spacer 741_2 andthe fourth inner spacer 742_2 may have a same property. For example, thefirst inner spacer 741_1 and the second inner spacer 742_1 may havedifferent materials from those of the third inner spacer 741_2 and thefourth inner spacer 742_2.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 11. The differencefrom the semiconductor device illustrated in FIG. 2 will be highlighted.FIG. 11 is a cross-sectional view of a semiconductor device according toanother example embodiment.

Referring to FIG. 11, in the semiconductor device according to anotherexample embodiment, a substrate 800 may be a silicon-on-insulator (SOI)substrate. Thus, the substrate 800 may include a silicon layer 800_1 andan insulating layer 800_2 disposed on the silicon layer 800_1. Each ofthe first lower pattern 101 and the second lower pattern 102 may bedisposed on the insulating layer 800_2. The insulating layer 800_2 mayinclude, for example, silicon oxide (SiO₂). The silicon layer 800_1 maybe, for example, a silicon substrate.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 12. The differencefrom the semiconductor device illustrated in FIG. 2 will be highlighted.FIG. 12 is a cross-sectional view of a semiconductor device according toanother example embodiment.

Referring to FIG. 12, in the semiconductor device according to anotherexample embodiment, an upper surface of the first source/drain region951 may be formed to be higher than an upper surface of the thirdnanowire 113 which is an uppermost nanowire on the first lower pattern101. Further, an upper surface of the second source/drain region 952 maybe formed to be higher than an upper surface of the sixth nanowire 116which is an uppermost nanowire on the second lower pattern 102.

An upper surface of a first silicide film 991 may be formed to be higherthan an upper surface of the third nanowire 113. An upper surface of asecond silicide film 992 may be formed to be higher than an uppersurface of the sixth nanowire 116.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 13. The differencefrom the semiconductor device illustrated in FIG. 2 will be highlighted.FIG. 13 is a cross-sectional view of a semiconductor device according toanother example embodiment.

Referring to FIG. 13, in the semiconductor device according to anotherexample embodiment, a first source/drain contact 1081 may not extendwithin the first source/drain region 151. Thus, the first source/draincontact 1081 may be disposed on an upper surface of the firstsource/drain region 151. Further, a second source/drain contact 1082 maynot extend within the second source/drain region 152. Thus, the secondsource/drain contact 1082 may be disposed on an upper surface of thesecond source/drain region 152.

A first silicide film 1091 may be disposed between the firstsource/drain contact 1081 and the first source/drain region 151. Asecond silicide film 1092 may be disposed between the secondsource/drain contact 1082 and the second source/drain region 152.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 14. The differencefrom the semiconductor device illustrated in FIG. 2 will be highlighted.FIG. 14 is a cross-sectional view of a semiconductor device according toanother example embodiment.

Referring to FIG. 14, in the semiconductor device according to anotherexample embodiment, a sidewall of a first source/drain region 1151 incontact with the first to third nanowires 111, 112, 113 may extend inthe third direction Z so as to have a certain slope profile.

Lengths in the first direction X with respect to each of the first tothird nanowires 111, 112, 113 disposed between the first source/drainregions 1151 may be same as one another.

Hereinbelow, a semiconductor device according to another exampleembodiment will be described with reference to FIG. 15. The differencefrom the semiconductor device illustrated in FIG. 2 will be highlighted.FIG. 15 is a cross-sectional view of a semiconductor device according toanother example embodiment.

Referring to FIG. 15, in the semiconductor device according to anotherexample embodiment, a sidewall of a first source/drain region 1251 incontact with the first to third nanowires 111, 112, 113 may extend inthe third direction Z so as to have a certain slope profile. Further, asidewall of a second source/drain region 1252 in contact with the fourthto sixth nanowires 114, 115, 116 may extend in the third direction Z soas to have a certain slope profile.

Lengths in the first direction X with respect to each of the first tothird nanowires 111, 112, 113 disposed between the first source/drainregions 1251 may be same as one another. Further, lengths in the firstdirection X with respect to each of the fourth to sixth nanowires 114,115, 116 disposed between the second source/drain regions 1252 may besame as one another.

As described above, embodiments relate to a semiconductor deviceincluding a multi-bridge channel field effect transistor (MBCFET™).

Embodiments may provide a semiconductor device with enhanced reliabilityby adjusting a property of an inner spacer disposed in an NMOS regionand a property of an inner spacer disposed on a PMOS region, andeffectively forming threshold voltage shift between a threshold voltageof an NMOS transistor and a threshold voltage of a PMOS transistor.

Example embodiments have been disclosed herein, and although specificterms are employed, they are used and are to be interpreted in a genericand descriptive sense only and not for purpose of limitation. In someinstances, as would be apparent to one of ordinary skill in the art asof the filing of the present application, features, characteristics,and/or elements described in connection with a particular embodiment maybe used singly or in combination with features, characteristics, and/orelements described in connection with other embodiments unless otherwisespecifically indicated. Accordingly, it will be understood by those ofskill in the art that various changes in form and details may be madewithout departing from the spirit and scope of the present invention asset forth in the following claims.

What is claimed is:
 1. A semiconductor device, comprising: a substratehaving a first region and a second region; first and second nanowiresdisposed sequentially on the substrate in the first region, andextending respectively in a first direction; third and fourth nanowiresdisposed sequentially on the substrate in the second region, andextending respectively in the first direction; a first inner spacerbetween the first nanowire and the second nanowire, and includinghydrogen of a first hydrogen mole fraction; and a second inner spacerbetween the third nanowire and the fourth nanowire, and includinghydrogen of a second hydrogen mole fraction that is greater than thefirst hydrogen mole fraction.
 2. The semiconductor device of claim 1,wherein: the first inner spacer includes oxygen of a first oxygen molefraction, and the second inner spacer includes oxygen of a second oxygenmole fraction that is greater than the first oxygen mole fraction. 3.The semiconductor device of claim 1, wherein: the first inner spacer andthe second inner spacer are disposed at a same level, and a firstthickness in the first direction of the first inner spacer is greaterthan a second thickness in the first direction of the second innerspacer.
 4. The semiconductor device of claim 3, wherein: the firstthickness of the first inner spacer is 3 nm to 5 nm, and the secondthickness of the second inner spacer is 2 nm to 4 nm.
 5. Thesemiconductor device of claim 1, wherein the first inner spacer and thesecond inner spacer include different materials from each other.
 6. Thesemiconductor device of claim 5, wherein the first inner spacer includesSiN and the second inner spacer includes SiON.
 7. The semiconductordevice of claim 1, further comprising: a third inner spacer on the firstinner spacer between the first nanowire and the second nanowire, and afourth inner spacer on the second inner spacer between the thirdnanowire and the fourth nanowire.
 8. The semiconductor device of claim7, wherein the first and second inner spacers include differentmaterials from those of the third and fourth inner spacers.
 9. Thesemiconductor device of claim 8, wherein: each of the first and secondinner spacers includes SiON, and each of the third and fourth innerspacers includes SiN.
 10. The semiconductor device of claim 1, furthercomprising: a first gate electrode surrounding the first and secondnanowires and extending in a second direction different from the firstdirection, and a second gate electrode surrounding the third and fourthnanowires and extending in the second direction.
 11. The semiconductordevice of claim 1, wherein a threshold voltage of the first region isdifferent from a threshold voltage of the second region.
 12. Asemiconductor device, comprising: a substrate having a first region anda second region; first and second nanowires disposed sequentially on thesubstrate in the first region and extending respectively in a firstdirection; third and fourth nanowires disposed sequentially on thesubstrate in the second region and extending respectively in the firstdirection; a first gate electrode surrounding the first and secondnanowires and extending in a second direction different from the firstdirection; a second gate electrode surrounding the third and fourthnanowires and extending in the second direction; a first inner spacer onat least one side of the first gate electrode between the first nanowireand the second nanowire, and including oxygen of a first oxygen molefraction; and a second inner spacer on at least one side of the secondgate electrode between the third nanowire and the fourth nanowire, andincluding oxygen of a second oxygen mole fraction that is greater thanthe first oxygen mole fraction.
 13. The semiconductor device of claim12, wherein: the first inner spacer includes hydrogen of a firsthydrogen mole fraction, and the second inner spacer includes hydrogen ofa second hydrogen mole fraction that is greater than the first hydrogenmole fraction.
 14. The semiconductor device of claim 12, wherein: thefirst inner spacer and the second inner spacer are disposed at a samelevel, and a first thickness in the first direction of the first innerspacer is greater than a second thickness in the first direction of thesecond inner spacer.
 15. The semiconductor device of claim 12, whereinthe first inner spacer and the second inner spacer include a samematerial.
 16. The semiconductor device of claim 12, further comprising:a third inner spacer on the first inner spacer between the firstnanowire and the second nanowire, and a fourth inner spacer on thesecond inner spacer between the third nanowire and the fourth nanowire.17. A semiconductor device, comprising: a substrate having a firstregion and a second region; first to third nanowires disposedsequentially on the substrate in the first region and extendingrespectively in a first direction; fourth to sixth nanowires disposedsequentially on the substrate in the second region and extendingrespectively in the first direction; a first gate electrode surroundingthe first to third nanowires and extending in a second directiondifferent from the first direction; a second gate electrode surroundingthe fourth to sixth nanowires and extending in the second direction; afirst source/drain region on at least one side of the first to thirdnanowires; a second source/drain region on at least one side of thefourth to sixth nanowires; a first inner spacer on at least one side ofthe first gate electrode between the first nanowire and the secondnanowire, and including oxygen of a first oxygen mole fraction andhydrogen of a first hydrogen mole fraction; a second inner spacer on atleast one side of the second gate electrode between the fourth nanowireand the fifth nanowire, and including oxygen of a second oxygen molefraction that is greater than the first oxygen mole fraction, andhydrogen of a second hydrogen mole fraction that is greater than thefirst hydrogen mole fraction; a first source/drain contact connectedwith the first source/drain region; and a second source/drain contactconnected with the second source/drain region.
 18. The semiconductordevice of claim 17, further comprising: a third inner spacer on thefirst inner spacer between the first nanowire and the second nanowire,and a fourth inner spacer on the second inner spacer between the fourthnanowire and the fifth nanowire.
 19. The semiconductor device of claim17, wherein the first inner spacer includes SiN, and the second innerspacer includes SiON.
 20. The semiconductor device of claim 17, whereineach of the first inner spacer and the second inner spacer includesSiON.